RF-MEMS packaging technique using benzocyclobutene (BCB)

نویسندگان

  • Seonho Seok
  • Romain Crunelle
  • Michel Fryziel
  • Nathalie Rolland
  • Paul-Alain Rolland
چکیده

RF-MEMS switches contain movable fragile parts. A specific packaging approach is required for reasons of protection during fabrication as well as during operation. We present in this paper a 0-level packaging process using a photopatternable polymer BenzoCycloButene and its performances measured up to 110 GHz.

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تاریخ انتشار 2008